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基于“凸节”结构的超声温度传感器设计

Design of ultrasonic temperature sensor based on convex section structure

  • 摘要: 温度参数是航空发动机在燃烧稳定性试验中的重要参数,基于单晶氧化物的超声测温相对于其他测温方法具有范围广、稳定性好的优点。首先,分析并设计传感器参数,通过COMSOL有限元仿真模拟“凸节”结构在不同直径及曲率下声波的传输及传感器工作状态,其结果表明“凸节”模型具有良好的声速-温度特性;然后,采用激光加热基座法生长新型“凸节”结构的蓝宝石声波导杆,制作与仿真参数一致的超声温度传感器并搭建测温系统,在工作温度1600 ℃的高温炉完成传感器静态标定,其测试结果验证传感器可在1 600 ℃高温环境连续工作5 h,重复性达95.43%,单位灵敏度为12.57~35.72 ns·(℃·m)−1。与激光刻蚀“凹槽”结构相比,这种“凸节”结构表现出卓越的结构稳定性和抗氧化性,更能满足高温测试需求,为解决高温环境监测和新型材料的结构研究提供了新方法。

     

    Abstract: Temperature parameter is an important aspect of the combustion stability test for aeroengines. Compared to other temperature measurement methods, ultrasonic temperature measurement based on single crystal oxide offers advantages such as a wide range and good stability. Firstly, the sensor parameters are analyzed and designed, sound wave transmission and the working state of the sensor under different diameters and curvatures of the convex section structure are simulated with COMSOL. The simulation results demonstrate that the convex section structure exhibits a strong sound-temperature relationship. Secondly, the ultrasonic temperature sensor that consistent with the simulation parameters is fabricated using sapphire acoustic waveguide grown by laser heated pedestal growth, and a temperature measurement system is accordingly established. Static calibration is conducted in a high-temperature furnace with a working temperature of 1 600 ℃. The test results confirm that the sensor can operate continuously for 5 h in high-temperature environments with repeatability at 95.43% and unit sensitivity ranging from 12.57 to 35.72 ns·(℃·m)−1. In comparison to laser etching’s “groove” structure, this new “convex section” structure demonstrates improved structural stability and oxidation resistance, making it better suited for high-temperature testing. It provides a method for monitoring temperature environments and conducting structural research on new materials.

     

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