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相位迁移成像的倒装芯片缺陷高频超声检测

High-frequency ultrasonic method for defect detection of flip-chip based on phase shift imaging

  • 摘要: 倒装焊芯片高频超声检测的回波微弱,易受环境噪声、晶粒散射回波噪声影响,且合成孔径重构芯片B扫图像速度较慢、分辨率低,导致焊球缺陷难以分辨。针对这些问题,文章提出了一种基于局部符号相干因子(local sign coherence factor,LSCF)的聚焦换能器相位迁移成像(focused transducer phase shift migration, FTPSM)算法,用以加快芯片B扫图像重构,增强图像分辨率并提高检测精度。首先,结合聚焦型超声换能器接收的回波信号形式,对回波信号进行时域补偿;随后,求解芯片B扫图各局部的互相关系数,基于相位相干方法(phase coherence imaging,PCI)求取局部相位相干因子,并基于此抑制芯片B扫描矩阵的噪声幅值;最后,对加权处理后的B扫描矩阵在频域-波数域上进行波场外推,利用COMSOL 5.6建立倒装焊芯片焊球缺陷的高频超声检测仿真模型,进行仿真与实验结果对比验证。结果表明,该算法适用于合成孔径聚焦技术,且相较于原相位相干算法,所处理芯片B扫图像信噪比平均提升10.5 dB,信号幅值平均提升13.4 dB,显著提高了芯片B扫图像横向分辨率,有效抑制了噪声干扰。

     

    Abstract: The echo signal in flip-chip high-frequency ultrasonic testing is weak and highly susceptible to environmental noise and grain scattering. The B-scan image reconstruction speed for flip-chip bumps is slow, and the low resolution hinders clear identification of solder ball defects. This paper proposes a Focused Transducer Phase Shift Migration (FTPSM) algorithm based on the Local Sign Coherence Factor (LSCF) to accelerate B-scan image reconstruction, enhance spatial resolution, and improve defect detection accuracy. First, time-domain compensation is applied to the echo signals received by the focused ultrasonic transducer. Next, the cross-correlation coefficient is computed for each local region of the chip’s B-scan image; the local phase coherence factor is then derived using Phase Coherence Imaging (PCI), and used to suppress noise amplitude in the B-scan matrix. Finally, the weighted B-scan matrix is extrapolated in the frequency–wavenumber domain. A high-frequency ultrasonic simulation model of flip-chip bump defects is established using COMSOL Multiphysics 5.6, and simulation results are validated against experimental data. Results demonstrate that the proposed algorithm is compatible with synthetic aperture focusing techniques. Compared with the conventional phase coherence algorithm, the B-scan images processed by FTPSM exhibit an average signal-to-noise ratio (SNR) improvement of 10.5 dB and an average signal amplitude increase of 13.4 dB. Moreover, the lateral resolution is significantly enhanced, and noise interference is effectively suppressed.

     

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