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激光干涉法测量微小振动

Measurement of small vibration by laser interferometer

  • 摘要: 文章介绍用激光干涉法测量新型压电微驱动器动态位移响应的实验原理及方法。实验结果表明,这类PZNPZT微驱动器不仅具有高的电压位移灵敏度,而且其频响可高达1kHz,是一种很好的微驱动器件

     

    Abstract: The theory and experimental method of measuring a small vibrating displacement by laser interferometer are introduced in the paper.And the experimental results of dynamic response displacement of a new kind of tiny piezoelectric driver are obtained.The results show that the kind of PZN-PZT tiny driver not only has high voltage displacement sensitivity,but also it is frequency response approaches 1kHz,so it's one very good kind of tiny driver.

     

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